A simple extension method of the ICP algorithm using point quality based on the distance and incident angle is presented for improving the registration accuracy of TLS point clouds. First, using a structured point cloud representation, the distance and incident angle of each point are calculated. Then, quality measures for the distance and incident angle are defined, considering the relationship between them and the scanning errors. Finally, an extension method of the ICP algorithm by the weighting using the estimated point qualities is described. A method for efficient matching using point properties is also introduced. The proposed method is applied to two datasets of TLS point clouds of a small plant and an outdoor environment, and the effectiveness is evaluated by comparing registration errors with the ground truths obtained using the scan target and a total station.