With the improvement of the accuracy and efficiency of laser scanning technology, high-resolution terrestrial laser scanning (TLS) technology can obtain high precise points-cloud and density distribution and can be applied to high-precision deformation monitoring of subway tunnels and high-speed railway bridges and other fields. In this paper, a new approach using a points-cloud segmentation method based on vectors of neighbor points and surface fitting method based on moving least squares was proposed and applied to subway tunnel deformation monitoring in Tianjin combined with a new high-resolution terrestrial laser scanner (Riegl VZ-400). There were three main procedures. Firstly, a points-cloud consisted of several scanning was registered by linearized iterative least squares approach to improve the accuracy of registration, and several control points were acquired by total stations (TS) and then adjusted. Secondly, the registered points-cloud was resampled and segmented based on vectors of neighbor points to select suitable points. Thirdly, the selected points were used to fit the subway tunnel surface with moving least squares algorithm. Then a series of parallel sections obtained from temporal series of fitting tunnel surfaces were compared to analysis the deformation. Finally, the results of the approach in z direction were compared with the fiber optical displacement sensor approach and the results in x, y directions were compared with TS respectively, and comparison results showed the accuracy errors of x, y, z directions were respectively about 1.5 mm, 2 mm, 1 mm. Therefore the new approach using high-resolution TLS can meet the demand of subway tunnel deformation monitoring.